MSD Series Sputtering Power Supply
Ngā āhuatanga
● Whakataunga whatanga
● Te urupare arc tere, te wa whakautu <100ns
● Pupuri pūngao raro, <1mJ/kW
● Hanganga whakaurunga kiato, 3U tahuhu paerewa
● atanga whakaatu Hainamana / Ingarihi, ngawari ki te whakahaere
● Mana tika
● Te whānuitanga o nga putanga
● mahi tiaki tino
Taipitopito Hua
Whakauru | Ngaohiko whakauru: 3AC380V±10% |
Te Hiko: 20kW, 30 kWIte auau hiko whakauru: 50Hz/60Hz | |
Putanga | Max.ngaohiko putanga: 800V |
Max.putanga o nāianei: 50A, 75A | |
Putanga ripple nāianei: ≤3% rms | |
Ripple Ngaohiko Putanga: ≤2% rms | |
Taupū Hangarau | Ngaohiko whakakorikori: 1000V / 1200V te whiriwhiri |
Te kaha o te hurihanga: 95% | |
Wā wehe: <100ns | |
Atanga whakawhitiwhiti: Paerewa RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet me EtherCAT he mea whiriwhiri) | |
Ahu(H*W*D)mm: 132*482*560: 176*482*700 | |
Aratau whakamahana: whakamahana hau | |
Tuhipoka: kei te whakahou tonu te hua me te whakapai tonu te mahi.Ko tenei whakaahuatanga tawhā mo te tohutoro anake. |
Tuhia to korero ki konei ka tukuna mai ki a matou